• DocumentCode
    1312227
  • Title

    MEM´s the word for optical beam manipulation

  • Author

    Lau, K.Y.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA
  • Volume
    13
  • Issue
    4
  • fYear
    1997
  • fDate
    7/1/1997 12:00:00 AM
  • Firstpage
    11
  • Lastpage
    18
  • Abstract
    The best way to switch the direction of an optical beam is simply to rotate a mirror, focus an optical beam by mechanically translating a lens, or extinguish an unwanted optical beam by physically blocking its path. Recent, independent developments in microelectromechanical (MEM) devices promise to remedy the issue of high cost and unreliability associated with the “moving parts” needed for these optical functions. This article describes some aspects of these recent developments undertaken in the “microphotonics” group at U.C. Berkeley on building MEM-based optical systems on a silicon chip
  • Keywords
    micromechanical devices; optical elements; MEMS; Si; microelectromechanical device; microphotonics; optical beam manipulation; silicon chip; Cost function; Lenses; Mirrors; Optical beams; Optical devices; Optical switches; Silicon;
  • fLanguage
    English
  • Journal_Title
    Circuits and Devices Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    8755-3996
  • Type

    jour

  • DOI
    10.1109/101.600704
  • Filename
    600704