DocumentCode
1312227
Title
MEM´s the word for optical beam manipulation
Author
Lau, K.Y.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA
Volume
13
Issue
4
fYear
1997
fDate
7/1/1997 12:00:00 AM
Firstpage
11
Lastpage
18
Abstract
The best way to switch the direction of an optical beam is simply to rotate a mirror, focus an optical beam by mechanically translating a lens, or extinguish an unwanted optical beam by physically blocking its path. Recent, independent developments in microelectromechanical (MEM) devices promise to remedy the issue of high cost and unreliability associated with the “moving parts” needed for these optical functions. This article describes some aspects of these recent developments undertaken in the “microphotonics” group at U.C. Berkeley on building MEM-based optical systems on a silicon chip
Keywords
micromechanical devices; optical elements; MEMS; Si; microelectromechanical device; microphotonics; optical beam manipulation; silicon chip; Cost function; Lenses; Mirrors; Optical beams; Optical devices; Optical switches; Silicon;
fLanguage
English
Journal_Title
Circuits and Devices Magazine, IEEE
Publisher
ieee
ISSN
8755-3996
Type
jour
DOI
10.1109/101.600704
Filename
600704
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