DocumentCode
1315783
Title
Passive electrical vernier for measuring mask misalignment
Author
Walton, J. ; Fallon, M. ; Ward, D. ; Holwill, R.J.
Author_Institution
Inst. of Acoust., Nanjing Univ., China
Volume
26
Issue
15
fYear
1990
fDate
7/19/1990 12:00:00 AM
Firstpage
1173
Lastpage
1174
Abstract
A passive electrical vernier for the measurement of the misalignment between the layers of integrated circuits is presented. This three layer structure has the same simplicity of processing as analogue structures along with the advantages of digital measurement which make it an attractive alternative for measuring the mask misalignment between layers.
Keywords
VLSI; displacement measurement; integrated circuit technology; masks; position measurement; digital measurement; layers of integrated circuits; mask misalignment between layers; measuring mask misalignment; passive electrical vernier; three layer structure;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19900759
Filename
82929
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