DocumentCode
1326127
Title
Small print [micromechanical devices]
Author
Ward, Michael
Volume
79
Issue
1
fYear
2000
fDate
2/1/2000 12:00:00 AM
Firstpage
46
Lastpage
47
Abstract
Printing technology has already revolutionised the world twice. The next revolution will apply to countless manufactured products. The lithographic technology that has been developed to support the manufacturing process in microelectronics is now been exploited to produce miniature mechanical devices, such as motors and sensors, for a whole range of completely new applications
Keywords
lithography; manufacturing processes; micromechanical devices; technological forecasting; lithography; manufacturing process; micromechanical devices; micromotors; microsensors; microswitches;
fLanguage
English
Journal_Title
Manufacturing Engineer
Publisher
iet
ISSN
0956-9944
Type
jour
DOI
10.1049/me:20000113
Filename
838833
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