DocumentCode
1329858
Title
Microfabricated fluxgate sensors with low noise and wide bandwidth
Author
Robertson, P.A.
Author_Institution
Dept. of Eng., Cambridge Univ., UK
Volume
36
Issue
4
fYear
2000
fDate
2/17/2000 12:00:00 AM
Firstpage
331
Lastpage
332
Abstract
Miniature fluxgate magnetic sensors have been micro-fabricated using thin film planar technology on glass substrates. The 1000×200 μm sensors comprise a copper multilayer solenoid winding with a thin amorphous cobalt alloy core deposited by RF magnetron sputtering. The bandwidth and sensitivity of a closed-loop sensor system using these novel devices is 0-2.5 MHz and 5000 V/T, respectively, with a spectral noise density of 2 nT/√Hz at 10 kHz
Keywords
cobalt alloys; copper; fluxgate magnetometers; magnetic noise; magnetic sensors; sputtered coatings; thin film devices; 0 to 2.5 MHz; 1000 micron; 200 micron; Cu; Cu multilayer solenoid winding; RF magnetron sputtering; closed-loop sensor system; glass substrates; low noise; microfabricated fluxgate sensors; miniature fluxgate magnetic sensors; thin amorphous Co alloy core; thin film planar technology; wide bandwidth;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20000308
Filename
840241
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