Thin Film Permeability Evaluation Based on Skin Effect Using Meander-Type Probe Up to 10.6 GHz

Author

Yabukami, Shin ; Sato, Akira ; Takahashi, Junji ; Ozawa, Toshihiro ; Miyazawa, Y. ; Yanagi, Kenjiro ; Shimada, Yusuke ; Munakata, M. ; Shiokawa, T.

Author_Institution

Fac. of Eng., Tohoku Gakuin Univ., Tagajo, Japan

Volume

47

Issue

10

fYear

2011

Firstpage

2570

Lastpage

2572

Abstract

A highly sensitive and broadband method of obtaining thin film permeability without limitations in sample size was developed based on the high-frequency impedance change because of skin effect. A meander-type probe (3.5 mm × 2.5 mm, 2 turns) was placed in proximity of a (Co₂₅Fe₇₅)₉₀B₁₀ film (45 mm × 25 mm, 0.53 μm thick), and the permeability was optimized by Newton-Raphson method. The measured values are in good agreements with theoretical values based on the Landau-Lifshitz-Gilbert equation up to 10.6 GHz. The proposed method shows promise for measuring the permeability of wafer-sized samples in line because it is not restricted by size limitations.

Keywords

Newton-Raphson method; boron alloys; cobalt alloys; electric impedance; iron alloys; magnetic anisotropy; magnetic permeability; magnetic thin films; skin effect; (Co₂₅Fe₇₅)₉₀B₁₀; Landau-Lifshitz-Gilbert equation; Newton-Raphson method; high-frequency impedance; magnetic anisotropy; magnetic thin film permeability; meander-type probe; size 0.53 mum; size 25 mm; size 45 mm; skin effect; wafer-sized samples; Impedance; Magnetic resonance; Permeability; Perpendicular magnetic anisotropy; Probes; Saturation magnetization; Meander probe; skin effect; thin film permeability;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2011.2158396

Filename

6028234