A CMOS Digitized Silicon Condenser Microphone for Acoustic Applications

Author

Chiang, Cheng-Ta ; Wu, Chia-Yu

Author_Institution

Dept. of Electr. Eng., Nat. Chia-Yi Univ., Chiayi, Taiwan

Volume

11

Issue

2

fYear

2011

Firstpage

296

Lastpage

304

Abstract

In this paper, a CMOS digitized silicon condenser microphone for acoustic applications is newly proposed. The proposed CMOS digitized silicon condenser microphone is attractive due to the fact that the sensor and all the circuits are robustly and compactly integrated. Another innovation of this proposed CMOS digitized silicon condenser microphone is that it could be operated without charge pump circuits. Thus, the sensor and circuits can be performed at the same power supply. Based upon 0.35 μ m 2P4M CMOS technology with 3 V power supply, measurement results have successfully verified the correct function and performance of the proposed CMOS digitized silicon condenser microphone. The area of the proposed CMOS digitized silicon condenser microphone is 1444 × 1383 μm² and the FOM of the sigma-delta modulator is 163.85 dB. The proposed CMOS digitized silicon condenser microphone is suitable for mobile phones, laptops, PDAs, and hearing aids, etc.

Keywords

CMOS digital integrated circuits; elemental semiconductors; microphones; modulators; sigma-delta modulation; silicon; 2P4M CMOS technology; CMOS digitized silicon condenser microphone; Si; acoustic sensor; integrated circuits; noise figure 163.85 dB; sigma-delta modulator; size 0.35 mum; voltage 3 V; CMOS integrated circuits; CMOS technology; Charge pumps; Impedance; Microphones; Power supplies; Silicon; CMOS; Capacitive sensor; sensor interface; sensor transducer; silicon condenser microphone;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2010.2071380

Filename

5585655