Recent Development of Micromachined Biosensors

The aim of this paper is to provide a panoramic view of recent advancements for the micromachined biosensors. In terms of different sensing principles, three categories of biosensors that have attracted much attention in recent decade are reviewed, which are electrochemical biosensors, microcantilever biosensors, and dielectric spectroscopic biosensors. Each type of biosensors has certain advantages and weaknesses, for example electrochemical biosensors can be easily integrated with readout circuits as they directly output electronic signals; microcantilever based biosensors are a label free sensing technique; dielectric spectroscopic biosensors provide a truly non-invasive sensing technique. All of above sensing techniques are compared in this paper based on previous published literatures. This paper will serve as a useful resource to help biosensor designers choose the most appropriate technology to meet their requirements.