DocumentCode
1336830
Title
Sheath structure of an electronegative plasma with cold positive ions
Author
Li, Ming ; Vyvoda, Michael A. ; Dew, Steven K. ; Brett, Michael J.
Author_Institution
Dept. of Chem. Eng., California Univ., Berkeley, CA, USA
Volume
28
Issue
1
fYear
2000
fDate
2/1/2000 12:00:00 AM
Firstpage
248
Lastpage
252
Abstract
The one-dimensional collisionless sheath model of electropositive plasmas is extended here to study the sheath structure of an electronegative plasma at steady state with the assumptions of cold positive ions and planar sheath configurations. Similar to the electropositive plasma sheath, a net charge layer is built within the sheath. However, the net charge density distribution within the sheath is sensitive to the plasma electronegativity (ratio of negative ion density n-b to the electron density ncb). It is most interesting that the sheath thickness varies nonmonotonically with the plasma electronegativity of the bulk plasma. Last, the effects of applied wall potential and temperature ratio of electrons to negative ions are discussed
Keywords
electronegativity; plasma density; plasma diagnostics; plasma sheaths; plasma temperature; positive ions; Cl2; F2; H2; O2; SF6; applied wall potential; bulk plasma; charged species density; cold positive ions; electron density; electronegative plasma sheath; electropositive plasma sheath; negative ion density; net charge density distribution; net charge layer; one-dimensional collisionless sheath model; planar sheath configurations; plasma electronegativity; sheath structure; sheath thickness; steady state; temperature ratio; Chemical engineering; Electron emission; Plasma applications; Plasma density; Plasma materials processing; Plasma sheaths; Plasma temperature; Radio frequency; Steady-state; Temperature sensors;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.842914
Filename
842914
Link To Document