• DocumentCode
    1336830
  • Title

    Sheath structure of an electronegative plasma with cold positive ions

  • Author

    Li, Ming ; Vyvoda, Michael A. ; Dew, Steven K. ; Brett, Michael J.

  • Author_Institution
    Dept. of Chem. Eng., California Univ., Berkeley, CA, USA
  • Volume
    28
  • Issue
    1
  • fYear
    2000
  • fDate
    2/1/2000 12:00:00 AM
  • Firstpage
    248
  • Lastpage
    252
  • Abstract
    The one-dimensional collisionless sheath model of electropositive plasmas is extended here to study the sheath structure of an electronegative plasma at steady state with the assumptions of cold positive ions and planar sheath configurations. Similar to the electropositive plasma sheath, a net charge layer is built within the sheath. However, the net charge density distribution within the sheath is sensitive to the plasma electronegativity (ratio of negative ion density n-b to the electron density ncb). It is most interesting that the sheath thickness varies nonmonotonically with the plasma electronegativity of the bulk plasma. Last, the effects of applied wall potential and temperature ratio of electrons to negative ions are discussed
  • Keywords
    electronegativity; plasma density; plasma diagnostics; plasma sheaths; plasma temperature; positive ions; Cl2; F2; H2; O2; SF6; applied wall potential; bulk plasma; charged species density; cold positive ions; electron density; electronegative plasma sheath; electropositive plasma sheath; negative ion density; net charge density distribution; net charge layer; one-dimensional collisionless sheath model; planar sheath configurations; plasma electronegativity; sheath structure; sheath thickness; steady state; temperature ratio; Chemical engineering; Electron emission; Plasma applications; Plasma density; Plasma materials processing; Plasma sheaths; Plasma temperature; Radio frequency; Steady-state; Temperature sensors;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.842914
  • Filename
    842914