DocumentCode

1339698

Title

High-purity thin films

Volume

3

Issue

5

fYear

1966

fDate

5/1/1966 12:00:00 AM

Firstpage

6

Lastpage

6

Keywords

Atmosphere; Contamination; Electronic circuits; Gettering; Laboratories; Sputtering; Telephony; Thin film circuits; Transistors; Vacuum systems;

fLanguage

English

Journal_Title

Spectrum, IEEE

Publisher

ieee

ISSN

0018-9235

Type

jour

DOI

10.1109/MSPEC.1966.5219616

Filename

5219616