Circular grating coupled DBR laser with integrated focusing outcoupler

Author

Kristjánsson, Sigurgeir ; Li, Ming ; Eriksson, Niklas ; Hagberg, Mats ; Killius, Karl-Johan ; Larsson, Anders

Author_Institution

Dept. of Optoelectron. & Electr. Meas., Chalmers Univ. of Technol., Goteborg, Sweden

Volume

9

Issue

4

fYear

1997

fDate

4/1/1997 12:00:00 AM

Firstpage

416

Lastpage

418

Abstract

We report on the fabrication and operation of a circular grating coupled, AlGaAs-InGaAs surface-emitting distributed Bragg reflector (DBR) SQW laser with an integrated focusing outcoupler. Electron beam lithography and reactive ion beam etching were used to fabricate the laser with a first-order resonant grating for optical feedback and a separate detuned, chirped second-order grating for outcoupling and focusing the beam.

Keywords

III-V semiconductors; aluminium compounds; diffraction gratings; distributed Bragg reflector lasers; electron beam lithography; gallium arsenide; indium compounds; integrated optics; laser feedback; optical couplers; optical fabrication; optical focusing; quantum well lasers; sputter etching; surface emitting lasers; AlGaAs-InGaAs; AlGaAs-InGaAs surface-emitting DBR SQW laser fabrication; circular grating coupled DBR laser; electron beam lithography; first-order resonant grating; integrated focusing outcoupler; optical feedback; reactive ion beam etching; separate detuned chirped second-order grating; Bragg gratings; Distributed Bragg reflectors; Distributed feedback devices; Electron beams; Ion beams; Laser feedback; Lithography; Optical coupling; Optical device fabrication; Surface emitting lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.559373

Filename

559373