• DocumentCode
    1341547
  • Title

    High-Δn silica-on-silicon channel waveguides based on sol-gel germanophosphosilicate glass

  • Author

    Syms, R.R.A. ; Schneider, V.M. ; Huang, W. ; Ahmad, M.M.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
  • Volume
    33
  • Issue
    14
  • fYear
    1997
  • fDate
    7/3/1997 12:00:00 AM
  • Firstpage
    1216
  • Lastpage
    1217
  • Abstract
    A process for fabrication of high-Δn silica-on-silicon channel waveguides by spin-coating and rapid thermal annealing of sol-gel germanophosphosilicate glass is described. A recipe for the preparation of stable sols and a parameter range for deposition of crack-free films are given. Low and spectrally flat insertion loss is demonstrated for singlemode guides with a Δn of 1.5×10-2
  • Keywords
    germanate glasses; optical fabrication; optical films; optical glass; optical waveguides; phosphosilicate glasses; rapid thermal annealing; sol-gel processing; GeO2-P2O5-SiO2; SiO2-Si; fabrication; film; insertion loss; rapid thermal annealing; refractive index difference; silica-on-silicon channel waveguide; single mode guide; sol-gel germanophosphosilicate glass; spin coating;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19970851
  • Filename
    603579
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1341547