DocumentCode
1341583
Title
Guest Editorial ISSM´96
Author
Hattori, Toshihiro
Volume
11
Issue
1
fYear
1998
Firstpage
1
Lastpage
2
Keywords
Abstracts; Contamination; Environmental management; International collaboration; Manufacturing industries; Pulp manufacturing; Semiconductor device manufacture; Silicon; Societies; Technology management;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.1998.661276
Filename
661276
Link To Document