Microelectromechanical vibration sensor with optical interconnects

Author

Peiner, Erwin ; Scholz, Dirk ; Fricke, Klaus ; Schlachetzki, Andreas ; Hauptmann, Peter

Author_Institution

Inst. fur Halbleitertech., Tech. Univ. Carolo-Wilhelmina, Braunschweig, Germany

Volume

7

Issue

1

fYear

1998

fDate

3/1/1998 12:00:00 AM

Firstpage

56

Lastpage

61

Abstract

A resonant vibration sensor realized using silicon micromachining for wear monitoring of rotating machinery is described. It comprises a mechanical resonator, piezoresistive bridge, and components for fiber-optical signal readout by an infrared light-emitting diode. The performance of the microsystem is demonstrated by its static and dynamical behavior. The results confirm that the described sensor has the potential for on-line vibration control of rotating machinery operated under the conditions of industrial production

Keywords

machine testing; micromachining; micromechanical resonators; microsensors; optical interconnections; piezoresistive devices; vibration measurement; wear testing; Si; fiber-optical signal readout; industrial production; infrared light emitting diode; mechanical resonator; microelectromechanical vibration sensor; on-line vibration control; optical interconnect; piezoresistive bridge; rotating machinery; silicon micromachining; wear monitoring; Machinery; Mechanical sensors; Micromachining; Optical interconnections; Optical sensors; Resonance; Sensor phenomena and characterization; Silicon; Vibrations; Wearable sensors;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.661384

Filename

661384