Correction to "High-temperature, low-modulus adhesive attach for large-area thin-film processing on silicon and alumina tiles"

Author

Varyiyam, M. ; Sundararaman, Vijayaraghavan ; Sitaraman, Suresh K. ; Wu, Junyong ; Wong, C.P.

Volume

Issue

fYear

2000

fDate

4/1/2000 12:00:00 AM

Firstpage

148

Lastpage

148

Keywords

Biographies; Error correction; Semiconductor thin films; Silicon; Transistors;

fLanguage

English

Journal_Title

Electronics Packaging Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

1521-334X

Type

DOI

10.1109/TEPM.2000.846938

Filename

846938

Link To Document