Parameter space for collisionless RF sheaths

Author

Manheimer, Wallace M.

Author_Institution

Div. of Plasma Phys., Naval Res. Lab., Washington, DC, USA

Volume

28

Issue

2

fYear

2000

fDate

4/1/2000 12:00:00 AM

Firstpage

359

Lastpage

366

Abstract

As plasma processing reactors approach higher density, the sheath models which neglect the radio frequency (RF) response of the ions become invalid. This work show that the nature of the collisionless RE ion sheath can be described in a number of different regimes of parameter space. These regimes can all be visualized on a single two-dimensional (2-D) plot where the horizontal axis is the ion plasma frequency divided by the frequency, and the vertical axis is the electron oscillating velocity divided by the ion sound speed

Keywords

plasma density; plasma materials processing; plasma sheaths; 2-D plot; Godyak-Lieberman RF sheath model; collisionless RF ion sheath; collisionless RF sheaths; conduction current; electron oscillating velocity; horizontal axis; ion plasma frequency; ion sound speed; modified DC sheath; parameter space; parameter space regimes; plasma density; plasma materials processing; plasma processing reactors; radio frequency response; sheath edge; sheath models; single two-dimensional plot; visualization; Acceleration; Electrons; Frequency conversion; Inductors; Plasma chemistry; Plasma density; Plasma materials processing; Plasma sheaths; Plasma temperature; Radio frequency;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.848093

Filename

848093