DocumentCode
1351860
Title
VLSI and other solid-state devices: New fabrication technologies put us on the threshold of a quantum jump in IC complexity
Author
Torrero, E.A.
Volume
16
Issue
1
fYear
1979
Firstpage
43
Lastpage
47
Abstract
Fabrication techniques have advanced to the point where semiconductor manufacturers are within sight of a long sought goal: achievement of submicrometre feature sizes a monolithic integrated circuit thereby providing a key capability for approaching the ultimate limits in IC complexity.
Keywords
integrated circuit technology; large scale integration; monolithic integrated circuits; IC complexity; VLSI; monolithic integrated circuit; Fabrication; Microprocessors; Random access memory; Switches; Testing; Transistors; Very large scale integration;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.1979.6368066
Filename
6368066
Link To Document