Microcantilever Array Pressure Measurement System for Biomedical Instrumentation

Author

Qu, Wenchao ; Islam, Syed Kamrul ; Mahfouz, Mohamed R. ; Haider, Mohammad R. ; To, Gary ; Mostafa, Salwa

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Univ. of Tennessee, Knoxville, TN, USA

Volume

10

Issue

2

fYear

2010

Firstpage

321

Lastpage

330

Abstract

An analog signal processing integrated circuit for microcantilever array has been designed for pressure measurement in biomedical applications. The chip consists of analog multiplexer, instrumentation amplifier, sample-and-hold circuit, on-chip voltage and current references, successive approximation register analog-to-digital converter (ADC) and digital control unit. Root sum square (RSS) error from the overall pressure measurement system including microcantilever array and the application specific integrated circuit (ASIC) is only Â±1.79 KPa within the measurement range of 0-300 KPa. The 8-bit ADC attains 45.4 dB signal-to-noise-and-distortion ratio (SNDR) and 56.4 dB spurious-free dynamic range (SFDR), while operating at 772 KHz. The integrated circuit has been fabricated using 0.35-Â¿m 2-poly 4-metal CMOS process technology. The chip occupies an area of 1.54 mm² and consumes 17.8 mW of power with a single 3.3 V supply.

Keywords

CMOS analogue integrated circuits; amplifiers; analogue integrated circuits; analogue processing circuits; analogue-digital conversion; application specific integrated circuits; bioMEMS; biomedical equipment; biomedical measurement; multiplexing equipment; pressure sensors; signal processing; ASIC; CMOS process; analog multiplexer; analog signal processing integrated circuit; analog-to-digital converter; application specific integrated circuit; biomedical instrumentation; current references; digital control unit; frequency 772 kHz; instrumentation amplifier; microcantilever array pressure measurement system; on-chip voltage references; power 17.8 mW; pressure 0 kPa to 300 kPa; root sum square error; sample-and-hold circuit; signal-to-noise-and-distortion ratio; spurious-free dynamic range; voltage 3.3 V; Analog integrated circuits; Application specific integrated circuits; Array signal processing; Biomedical measurements; Biomedical signal processing; Instruments; Multiplexing; Pressure measurement; Registers; Signal design; Analog multiplexer; analog-to-digital conversion (ADC); instrumentation amplifier; sample-and-hold;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2009.2034134

Filename

5361423