• DocumentCode
    1368157
  • Title

    Guest Editorial Equipment and Operations Automation in the Semiconductor Industry

  • Author

    Morrison, James R. ; Chien, Chen-Fu ; Dauzere-Peres, Stephane ; Dawande, Milind ; Ding, Han ; Pettinato, Jeffrey S. ; Yi, Jianjia

  • Author_Institution
    Korea Advanced Institute of Science and Technology (KAIST), Yuseong, Daejeon, Korea
  • Volume
    8
  • Issue
    1
  • fYear
    2011
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    The nine The ten papers in this special issue focus on three areas: equipment automation, operations automation, and modeling.
  • Keywords
    Electronics industry; Fabrication; Manufacturing systems; Special issues and sections;
  • fLanguage
    English
  • Journal_Title
    Automation Science and Engineering, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1545-5955
  • Type

    jour

  • DOI
    10.1109/TASE.2010.2078870
  • Filename
    5618590
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1368157