Linear microvibromotor for positioning optical components

Author

Daneman, Michael J. ; Tien, Norman C. ; Solgaard, Olav ; Pisano, Albert P. ; Lau, Kam Y. ; Muller, Richard S.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

Volume

5

Issue

3

fYear

1996

fDate

9/1/1996 12:00:00 AM

Firstpage

159

Lastpage

165

Abstract

We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. This device is developed for use in actuated micro-optical systems on silicon. Its submicron positioning resolution and a travel range of over 350 μm are excellent properties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation of the vibromotor dynamics is presented to explore optimization and control issues for this device

Keywords

linear motors; microactuators; micromachining; micromotors; optical elements; position control; actuated micro-optical systems; drive methods; electrostatically driven linear micromotor; linear microvibromotor; motor dynamics; optical component positioning; submicron positioning resolution; surface-micromachining technology; travel range; vibromotor precision; Actuators; Arm; Associate members; Electrostatics; Flanges; Motion control; Optical devices; Q factor; Resonance; Voltage;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.536622

Filename

536622