Modeling of surface acoustic wave strain sensors using coupling-of-modes analysis

Author

Cormack, Brian Mc ; Geraghty, Dermot ; O´Mahony, Margaret

Author_Institution

Dept. of Mech. & Manuf. Eng., Trinity Coll., Dublin, Ireland

Volume

58

Issue

11

fYear

2011

fDate

11/1/2011 12:00:00 AM

Firstpage

2461

Lastpage

2468

Abstract

SAW devices may be configured as strain sensors, providing passive, wireless strain measurement in demanding conditions. A key consideration is the modeling of the sensors, enabling different device designs to be considered. This paper presents a simulation scheme using coupling-of-modes (COM) analysis which allows both the frequency response of a SAW strain sensor and its bias sensitivity to be evaluated. Example applications are presented to demonstrate the use of the model.

Keywords

frequency response; sensitivity; strain measurement; strain sensors; surface acoustic wave sensors; COM analysis; SAW devices; coupling-of-modes analysis; frequency response; sensitivity; surface acoustic wave strain sensors; wireless strain measurement; Analytical models; Electrodes; Sensitivity; Sensors; Strain; Stress; Substrates; Acoustics; Computer Simulation; Computer-Aided Design; Elastic Modulus; Elasticity Imaging Techniques; Equipment Design; Equipment Failure Analysis; Materials Testing; Models, Theoretical; Scattering, Radiation; Transducers;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2011.2102

Filename

6071063