• DocumentCode
    1379990
  • Title

    Optimisation of empirical model for IC fabrication process using linear programming

  • Author

    Sprevak, D. ; Ferguson, R.S. ; Walton, A.J. ; Newsam, M.I.

  • Author_Institution
    Dept. of Stat. & Oper. Res., Queen´´s Univ., Belfast, UK
  • Volume
    145
  • Issue
    2
  • fYear
    1998
  • fDate
    3/1/1998 12:00:00 AM
  • Firstpage
    58
  • Lastpage
    60
  • Abstract
    A procedure for selecting alternative sets of optimal parameters for an NMOS semiconductor device manufacturing process is presented. An optimisation strategy is discussed which leads to the calculation of process parameters for devices that attain the designed characteristics while having the process parameters set at their most desirable values
  • Keywords
    integrated circuit technology; IC fabrication; NMOS semiconductor device; empirical model; linear programming; manufacturing process; optimal parameters; optimisation;
  • fLanguage
    English
  • Journal_Title
    Science, Measurement and Technology, IEE Proceedings -
  • Publisher
    iet
  • ISSN
    1350-2344
  • Type

    jour

  • DOI
    10.1049/ip-smt:19981810
  • Filename
    675746
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1379990