DocumentCode
138222
Title
Modelling, simulation and optimization for a SThm nanoprobe
Author
Bin Yang ; Lenczner, M. ; Cogan, S. ; Menges, Fabian ; Riel, Heike ; Gotsmann, Bernd ; Janus, Pawel ; Boetch, Guillaume
Author_Institution
FEMTO-ST, Univ. of Franche-Comte, Belfort, France
fYear
2014
fDate
7-9 April 2014
Firstpage
1
Lastpage
6
Abstract
This paper presents modelling, simulation and optimization results for a novel SThm probe. The model takes into account thermo-electro-mechanical equations. Moreover, a tip-surface contact model derived by taking into account microscopic multi-asperity contact is proposed and discussed. Results of multi-objective optimization are reported, and finally a multi-scale model that should reduce the simulation time is stated.
Keywords
scanning probe microscopy; SThm nanoprobe; microscopic multiasperity contact; multiobjective optimization; multiscale model; scanning thermal microscopy; thermoelectromechanical equations; tip-surface contact model; Abstracts; Heating; Optimization; Probes; Asymptotic model; Interface thermal conductance; Multi-objective optimization; Nanoprobe; Scanning thermal microscopy; Tip-surface contact;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (eurosime), 2014 15th international conference on
Conference_Location
Ghent
Print_ISBN
978-1-4799-4791-1
Type
conf
DOI
10.1109/EuroSimE.2014.6813869
Filename
6813869
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