Numerical modeling of an induction plasma installation including the generator state space model

Author

Ploteau, J.P. ; Fouladgar, J. ; Auger, F. ; Chentouf, A. ; Develey, G.

Author_Institution

LRTI, CRTT, Saint-Nazaire, France

Volume

32

Issue

5

fYear

1996

fDate

9/1/1996 12:00:00 AM

Firstpage

4305

Lastpage

4307

Abstract

A complete inductively coupled radio-frequency plasma installation is modeled. This installation includes an electrical generator coupled with a cylindrical inductor containing the plasma. The mathematical modeling of the generator with its triode uses a state space approach. A Runge-Kutta method is used to solve these differential equations. The electromagnetic equation of the inductor is solved by the moment method, whereas the electromagnetic equation of the plasma is solved by the finite difference method. The thermal equation of the argon plasma is solved by the control volume method. The simulations allow us to study the influence of the installation components on voltages, currents, dissipated powers and generator performances

Keywords

Runge-Kutta methods; differential equations; electromagnetic induction; equivalent circuits; finite difference methods; method of moments; plasma production; plasma simulation; power inductors; power supplies to apparatus; state-space methods; Ar; Ar plasma; Runge-Kutta method; control volume method; cylindrical inductor; differential equations; dissipated power; electrical generator; electromagnetic equation; finite difference method; generator state space model; induction plasma installation; installation components; mathematical modeling; moment method; numerical modeling; thermal equation; triode; Couplings; Difference equations; Electromagnetic induction; Induction generators; Inductors; Mathematical model; Numerical models; Plasma simulation; Radio frequency; State-space methods;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.538851

Filename

538851