Surface micromachined integrated optic polarization beam splitter

Author

Pu, Chuan ; Zhu, Zuhua ; Lo, Yu-Hwa

Author_Institution

Sch. of Electr. Eng., Cornell Univ., Ithaca, NY, USA

Volume

10

Issue

7

fYear

1998

fDate

7/1/1998 12:00:00 AM

Firstpage

988

Lastpage

990

Abstract

An integrated polarization beam splitting system composed of one binary phase Fresnel collimating lens and one polarization beam splitter (PBS) has been realized on a single Si chip using a commercially available foundry polysilicon surface micromachining process [Multi-User Mems Process, or (MUMPS)] at Mems Center at North Carolina (MCNC). The polarization extinction ratios of 10 dB for the transmitted light and over 20 dB for the reflected light have been achieved. The whole system is prealigned through computer-aided design on a Si substrate and is lifted up perpendicular to the substrate after structure release. This system opens opportunities for various applications where the light polarization states could be utilized.

Keywords

electromechanical effects; integrated optics; lenses; light polarisation; micromachining; optical collimators; optical design techniques; optical elements; MUMPS; Multi-User Mems Process; Si substrate; binary phase Fresnel collimating lens; computer-aided design; foundry polysilicon surface micromachining process; integrated polarization beam splitting system; light polarization states; polarization beam splitter; reflected light; single Si chip; structure release; surface micromachined integrated optic polarization beam splitter; transmitted light; Application software; Design automation; Extinction ratio; Foundries; Integrated optics; Lenses; Micromachining; Optical beam splitting; Optical collimators; Optical polarization;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.681293

Filename

681293