Polyimide/Ta/sub 2/O/sub 5//polyimide antiresonant reflecting optical waveguides

Author

Chu, A.K. ; Chuang, M.J.

Author_Institution

Inst. of Electro-Opt. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan

Volume

12

Issue

9

fYear

2000

Firstpage

1192

Lastpage

1194

Abstract

A novel antiresonant reflecting optical waveguide (ARROW) fabricated using both the organic and dielectric thin film technologies is presented for the first time. The ARROW consisted of the fluorinated polyimide and tantalum pentoxide (Ta/sub 2/O/sub 5/) hybrid layers deposited on a Si substrate. For TE polarized light, the propagation loss of the waveguide as low as 0.8 dB/cm is obtained at 632.8 nm. The propagation loss for TM polarized light is 2.7 dB/cm. Some design considerations of the hybrid ARROW are also discussed in this work.

Keywords

integrated optics; optical fabrication; optical losses; optical multilayers; optical polymers; 632.8 nm; ARROW; Si; Si substrate; TE polarized light; TM polarized light; Ta/sub 2/O/sub 5/; antiresonant reflecting optical waveguide; design considerations; dielectric thin film technologies; fluorinated polyimide; hybrid ARROW; integrated optics; polyimide/Ta/sub 2/O/sub 5//polyimide antiresonant reflecting optical waveguides; propagation loss; Optical films; Optical polarization; Optical refraction; Optical scattering; Optical sensors; Optical variables control; Optical waveguides; Polyimides; Polymers; Propagation losses;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.874232

Filename

874232