• DocumentCode
    1405138
  • Title

    Microdoped and microcompensated amorphous silicon films for infrared detection

  • Author

    Caputo, D. ; Nascetti, A. ; Palma, F.

  • Author_Institution
    Dipt. di Elettronica Eng., Rome Univ., Italy
  • Volume
    10
  • Issue
    8
  • fYear
    1998
  • Firstpage
    1147
  • Lastpage
    1149
  • Abstract
    In this letter, we demonstrate detection at room temperature of near and medium infrared (IR) radiation by using microdoped and microcompensated amorphous silicon as a separation layer in a p-n junction. The IR absorption in the 800-4600-nm wavelength range is due to the high density of trap states induced by the dopant impurities. In particular, we argue that detection in the medium IR range involves localized states near the valence band associated with boron doping. Detection of near-infrared (NIR) radiation can be related, instead, to localized states near the conduction band caused by distortion of the amorphous network due to the very low concentration of phosphorous and boron.
  • Keywords
    boron; compensation; conduction bands; infrared detectors; localised states; optical films; p-n junctions; phosphorus; silicon; valence bands; 800 to 4600 nm; IR absorption; IR detectors; NIR radiation detection; Si:B,P; amorphous network; boron doping; conduction band; dopant impurities; high density; infrared detection; localized states; low concentration; medium IR range; microdoped microcompensated amorphous silicon films; p-n junction; room temperature; separation layer; trap states; valence band; Amorphous silicon; Boron; Electromagnetic wave absorption; Impurities; Infrared detectors; P-n junctions; Radiation detectors; Semiconductor films; Silicon radiation detectors; Temperature;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/68.701531
  • Filename
    701531