Effects of ECR ion shower treatment on the magnetic and recording properties of CoCrTaPt thin film media

Author

Okumura, Y. ; Yasui, M. ; Akita, T. ; Maeda, M. ; Yang, X.B.

Author_Institution

Hard Disk Div., KUBOTA Corp., Hyogo, Japan

Volume

34

Issue

4

fYear

1998

fDate

7/1/1998 12:00:00 AM

Firstpage

1615

Lastpage

1617

Abstract

The electron-cyclotron-resonance (ECR) microwave plasma nitrogen or oxygen ions shower treatment on the NiP/Al substrates before sputtering leads to an increase in coercivity of CoCrTaPt/Cr isotropic media and a decrease in coercivity and OR of oriented media. And also we found that the medium noise and NLTS of the media become lower by using the substrates with ion shower treatment. The study of magnetic properties and microstructure of the media with and without ion shower treatment suggested that the improvement of the magnetic and recording properties of the CoCrTaPt/Cr films owing likely to the decrease in the intergranular magnetic coupling and the uniformity of the magnetic anisotropy. X-ray photoelectron spectroscopy (XPS) analysis indicated that the increase of the structural feature of N-H and N-O contributed to the improvement of them

Keywords

X-ray photoelectron spectra; chromium alloys; cobalt alloys; coercive force; exchange interactions (electron); magnetic anisotropy; magnetic noise; magnetic recording; magnetic thin films; plasma CVD coatings; platinum alloys; sputtering; tantalum alloys; CoCrTaPt; CoCrTaPt thin film media; ECR ion shower treatment; X-ray photoelectron spectroscopy; coercivity; intergranular magnetic coupling; magnetic anisotropy; magnetic properties; medium noise; microstructure; recording properties; Chromium; Coercive force; Magnetic anisotropy; Magnetic noise; Magnetic properties; Magnetic recording; Nitrogen; Perpendicular magnetic anisotropy; Plasmas; Sputtering;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.706633

Filename

706633