DocumentCode
1414093
Title
Magnetic Damage and Performance Recovery in Discrete Track Media
Author
Fan, Zhaohui ; Tung, Dave ; Ding, Yinfeng ; Steiner, Philip ; Xu, Yuan ; Thiele, Jan-Ulrich ; Wago, Koichi ; Kuo, David S.
Author_Institution
Seagate Technol., Recording Media Organ., Fremont, CA, USA
Volume
47
Issue
1
fYear
2011
Firstpage
69
Lastpage
73
Abstract
Discrete track media (DTM) has been widely studied recently as a solution to achieve high track density for hard disk drives. In DTM, nano-patterning process is used to isolate magnetic tracks. During the fabrication process, magnetic damage occurs in the resist striping process using O2 plasma. The on-track SNR of DTM degrades by ~ 2-3 dB. We used Ar IBE cleaning process to remove the oxide layer. The removal process induces unexpected magnetic property change. Nevertheless, this process can still improve the SNR significantly. However, the cleaning step also causes track corner rounding, and results in a faster SNR roll-off at high linear densities. Several methods for further improving DTM performance are discussed in this paper, including using a protective cap layer and media magnetic design reoptimization.
Keywords
disc drives; hard discs; magnetic recording; nanopatterning; optimisation; plasma materials processing; resists; Ar IBE cleaning process; cleaning step; discrete track media; fabrication process; hard disk drives; magnetic damage; magnetic track isolation; media magnetic design reoptimization; nanopatterning process; oxide layer removal; protective cap layer; resist striping process; Fabrication; Magnetic resonance imaging; Media; Perpendicular magnetic recording; Plasmas; Signal to noise ratio; Discrete track media; magnetic damage; nano-patterning processes; patterned media; recording performance;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2010.2079319
Filename
5676445
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