Prototype microactuators driven by magnetostrictive thin films

Author

Lim, S.H. ; Han, S.H. ; Kim, H.J. ; Choi, Jin-Woo ; Jin-Woo Choi ; Ahn, C.H.

Author_Institution

Thin Film Technol. Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea

Volume

34

Issue

4

fYear

1998

fDate

7/1/1998 12:00:00 AM

Firstpage

2042

Lastpage

2044

Abstract

Si microcantilevers coated with giant magnetostrictive Sm-Fe or Tb-Fe thin films are fabricated and the deflection of the cantilevers is measured as a function of magnetic field. In the case of a microcantilever with the dimension 3.7 mm (length)×1.0 mm (width)×13 μm (thickness), for example, a very large deflection of 52 μm is achieved at 150 Oe from the first ascending magnetic field, by the coating of a Sm_42.7Fe_56.9B_0.4 thin film with the thickness of 1.2 μm. Total deflection doubles when a magnetic field of the same amplitude (150 Oe) is applied alternately in the length and the width directions. Relatively large deflections are also observed for Tb-Fe thin film based microcantilevers as well as other Sm-Fe based cantilevers. The level of deflection achieved In the present magnetostrictive microcantilevers is considered to be suitable for microdevices applications

Keywords

giant magnetoresistance; magnetic thin film devices; magnetostrictive devices; microactuators; Si; Si microcantilever; Sm-Fe; Sm-Fe alloy; Tb-Fe; Tb-Fe alloy; deflection; giant magnetostrictive thin film; magnetic field; microactuator; microdevice; Coatings; Iron; Magnetic field measurement; Magnetic fields; Magnetic films; Magnetostriction; Microactuators; Prototypes; Semiconductor thin films; Transistors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.706786

Filename

706786