Microfabricated electrostatic actuators for hard disk drives

Author

Horsley, David A. ; Horowitz, Roberto ; Pisano, Albert P.

Author_Institution

DiCon Fiberopt. Inc., Berkeley, CA, USA

Volume

3

Issue

3

fYear

1998

fDate

9/1/1998 12:00:00 AM

Firstpage

175

Lastpage

183

Abstract

A dual-stage servo system which utilizes a high-bandwidth secondary actuator has been proposed for magnetic hard disk drives. Microfabricated actuators are promising candidates for this secondary actuator, since they offer the benefits of extremely small size and weight and may be batch fabricated for reduced production cost. This paper presents the design of an electrostatic microactuator which produces sufficient output force to move a 1.6-mg picoslider from a conventional disk drive at frequencies above 2 kHz. A linear second-order actuation model is developed and fit to experimental data. The prototype device is shown to have an open-loop resonance frequency of 532 Hz when loaded with the picoslider, and a DC-voltage-to-position gain of 0.12 μm/V. A closed-loop bandwidth of 2.5 kHz is achieved using a simple PD controller

Keywords

closed loop systems; dynamics; electrostatic devices; hard discs; mechatronics; microactuators; servomechanisms; two-term control; 2 kHz; 2.5 kHz; 532 Hz; PD controller; closed loop control; dynamics; electrostatic actuators; hard disk drives; linear second-order model; microactuators; picoslider; resonance; servo system; Costs; Disk drives; Electrostatic actuators; Frequency; Hard disks; Microactuators; Production; Prototypes; Resonance; Servomechanisms;

fLanguage

English

Journal_Title

Mechatronics, IEEE/ASME Transactions on

Publisher

ieee

ISSN

1083-4435

Type

jour

DOI

10.1109/3516.712113

Filename

712113