• DocumentCode
    1426009
  • Title

    Investigation on the Retention Reliability of Scaled \\hbox {SiO}_{2}/\\hbox {Al}_{x}\\hbox {O}_{y}/\\hbox {SiO}_{2} Inter-Poly Dielectrics for nand Flash memory; High-$k$ dielectric; inter-poly dielectric (IPD); retention reliability;

  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2009.2039985
  • Filename
    5419996
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1426009