Automatic monitoring of electrical parameters in the semiconductor industry based on ROC

Author

Riess, Eilon

Author_Institution

E&EE Dept., Imperial Coll. of Sci., Technol. & Med., London, UK

Volume

30

Issue

6

fYear

2000

fDate

11/1/2000 12:00:00 AM

Firstpage

853

Lastpage

857

Abstract

An algorithm is described which “teaches” a machine to imitate the decision made by a “clever” operator about significant events in a trend chart. The machine fits a single parameter in the “learning” process so that the “error” is minimized. The process is applied to electrical tests (ETs) used in the microelectronic industry. This is done by constructing receiver operator characteristics (ROCs). Analysis of the ROC curve enables us to fix a single parameter so that the error is minimized. An experiment had been performed on the Poly CD electrical test monitor at Tower Semiconductor Ltd. It tested and verified the algorithm

Keywords

decision theory; integrated circuit manufacture; process monitoring; production testing; signal processing; statistical process control; Poly CD electrical test monitor; ROC; automatic monitoring; electrical parameters; microelectronic industry; receiver operator characteristics; semiconductor industry; trend chart; Automation; Computerized monitoring; Condition monitoring; Decision making; Electronics industry; Microelectronics; Poles and towers; Process control; Production; Testing;

fLanguage

English

Journal_Title

Systems, Man and Cybernetics, Part A: Systems and Humans, IEEE Transactions on

Publisher

ieee

ISSN

1083-4427

Type

jour

DOI

10.1109/3468.895919

Filename

895919