• DocumentCode
    1434058
  • Title

    Reducing the substrate losses of RF integrated inductors

  • Author

    Mernyei, Ferenc ; Darrer, Franz ; Pardoen, Matthijs ; Sibrai, Andreas

  • Author_Institution
    Budapest Design Office, Austria Mikro Syst. Int. AG, Budapest, Hungary
  • Volume
    8
  • Issue
    9
  • fYear
    1998
  • fDate
    9/1/1998 12:00:00 AM
  • Firstpage
    300
  • Lastpage
    301
  • Abstract
    The authors introduce a new method for reducing the substrate-related losses of integrated spiral inductors for Si RF ICs. Measurement based equivalent circuit parameters are demonstrated. Using our method the quality factor increased from 5.3 to 6.0 at 3.5 GHz at an 1.8 nH inductor
  • Keywords
    MMIC; Q-factor; UHF integrated circuits; eddy current losses; equivalent circuits; inductors; silicon; 2.2 to 3.5 GHz; RF integrated inductors; Si; Si RF ICs; equivalent circuit parameters; onchip spiral inductors; quality factor; radiofrequency applications; substrate losses reduction; Eddy currents; Equivalent circuits; Inductors; Integrated circuit measurements; Q factor; Radio frequency; Radiofrequency integrated circuits; Silicon; Spirals; Substrates;
  • fLanguage
    English
  • Journal_Title
    Microwave and Guided Wave Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1051-8207
  • Type

    jour

  • DOI
    10.1109/75.720461
  • Filename
    720461