DocumentCode
1435597
Title
Microelectromechanical structures for materials research materials research society symposium proceedings, vol. 518 [Book Reviews]
Author
Shea, John
Volume
17
Issue
1
fYear
2001
Firstpage
45
Lastpage
45
Keywords
Automatic control; Books; Crystalline materials; Instruments; Internet; Java; Microelectromechanical systems; Microelectronics; Micromechanical devices; Testing;
fLanguage
English
Journal_Title
Electrical Insulation Magazine, IEEE
Publisher
ieee
ISSN
0883-7554
Type
jour
DOI
10.1109/MEI.2001.901625
Filename
901625
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