Microelectromechanical tunable filter with stable half symmetric cavity

A novel microelectromechanical tunable filter with a half symmetric cavity structure is described. The device exhibits a 3 dB linewidth of 0.27 nm, more than 70 nm tuning range under a voltage swing of 14 V and less than 0.9 dB insertion loss. The parameters of the optical cavity were tailored to efficiently couple 1550 nm light in and out of the devices using a singlemode fibre without any lenses. The structure exhibits a frequency response of 150 kHz at the 3 dB cutoff point