• DocumentCode
    1438409
  • Title

    Characterization of self-heating in advanced VLSI interconnect lines based on thermal finite element simulation

  • Author

    Rzepka, Sven ; Banerjee, Kaustav ; Meusel, Ekkehard ; Hu, Chenming

  • Author_Institution
    Tech. Univ. Dresden, Germany
  • Volume
    21
  • Issue
    3
  • fYear
    1998
  • fDate
    9/1/1998 12:00:00 AM
  • Firstpage
    406
  • Lastpage
    411
  • Abstract
    In this paper, self-heating of interconnects has been shown to affect the lifetime of next generation integrated circuits significantly more severely than today´s. The paper proves the necessity for extending the system of design rules, proposes a thermal design rule, and presents an efficient and quantitatively accurate thermal simulator as tool for the design process
  • Keywords
    VLSI; finite element analysis; integrated circuit design; integrated circuit interconnections; integrated circuit modelling; VLSI interconnect line; design rule; integrated circuit lifetime; self-heating; thermal finite element simulation; Circuit simulation; Current density; Electromigration; Finite element methods; Heating; Integrated circuit interconnections; Process design; Temperature dependence; Temperature sensors; Very large scale integration;
  • fLanguage
    English
  • Journal_Title
    Components, Packaging, and Manufacturing Technology, Part A, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1070-9886
  • Type

    jour

  • DOI
    10.1109/95.725203
  • Filename
    725203