A 10-60-GHz micromachined directional coupler

Author

Robertson, Stephen V. ; Brown, Andrew R. ; Katehi, Linda P B ; Rebeiz, Gabriel M.

Author_Institution

Radiation Lab., Michigan Univ., Ann Arbor, MI, USA

Volume

46

Issue

11

fYear

1998

fDate

11/1/1998 12:00:00 AM

Firstpage

1845

Lastpage

1849

Abstract

A 20-dB directional coupler has been designed and fabricated on a thin dielectric membrane using micromachining techniques. The fabrication process is compatible with monolithic microwave integrated-circuit (MMIC) techniques, and the coupler can be integrated into a planar-circuit layout. Design of the asymmetric tapered coupled-line coupler relies on simple quasi-static models and ideal transmission-line theory. The use of membrane technology results in less than 0.5-dB insertion loss in the coupler from 10 to 60 GHz. In addition, a micromachined packaging technique creates a shielded circuit, which is extremely compact and lightweight

Keywords

membranes; micromachining; microstrip directional couplers; millimetre wave directional couplers; 0.5 dB; 10 to 60 GHz; MMIC; asymmetric tapered coupled-line coupler; directional coupler; fabrication; insertion loss; micromachining; packaging; planar circuit; quasi-static model; shielded membrane microstrip; transmission line theory; Biomembranes; Coupling circuits; Dielectrics; Directional couplers; Fabrication; Integrated circuit technology; MMICs; Micromachining; Microwave theory and techniques; Transmission lines;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.734498

Filename

734498