Microfabrication of linear translator tuning elements in submillimeter-wave integrated circuits

Author

Lubecke, Victor M. ; McGrath, William R. ; Tai, Yu-Chong ; Rutledge, David B.

Author_Institution

Div. of Eng. & Appl. Sci., California Inst. of Technol., Pasadena, CA, USA

Volume

7

Issue

4

fYear

1998

fDate

12/1/1998 12:00:00 AM

Firstpage

404

Lastpage

410

Abstract

A micromechanical planar tuning element has been developed and demonstrated in a fully monolithic 620-GHz integrated circuit. It allows for the mechanical variation of the electrical length of a coplanar transmission line tuner and is called a sliding planar backshort (SPB). It consists of a movable patterned rectangular metal plate confined by polyimide flanges along two of its edges to allow guided linear translation along the length of a dielectric-coated coplanar transmission line. Its fabrication involves an application of sacrificial-layer and molding techniques to materials and processes which are compatible with the fabrication of a wide range of submillimeter-wave integrated circuits. This is the first reported micromechanically adjustable tuning element demonstrated at submillimeter wavelengths

Keywords

circuit tuning; coplanar transmission lines; micromachining; micromechanical devices; moulding; submillimetre wave integrated circuits; 620 GHz; dielectric coated coplanar transmission line; electrical length; linear translator; microfabrication; micromechanical planar tuning element; molding; monolithic submillimeter wave integrated circuit; polyimide flange; rectangular metal plate; sacrificial layer; sliding planar backshort; Circuit optimization; Coplanar transmission lines; Fabrication; Micromechanical devices; Monolithic integrated circuits; Polyimides; Submillimeter wave integrated circuits; Submillimeter wave propagation; Submillimeter wave technology; Tuners;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.735348

Filename

735348