DocumentCode
1448908
Title
Effects of a Pt underlayer and interlayer on the growth texture of strontium ferrite thin films
Author
Zhuang, Zailong ; Bian, Bo ; White, Robert M. ; Laughlin, David E.
Author_Institution
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Volume
36
Issue
5
fYear
2000
fDate
9/1/2000 12:00:00 AM
Firstpage
2942
Lastpage
2944
Abstract
The effects of a Pt underlayer and a Pt interlayer on the textured growth of the sputtered strontium ferrite (SrM) films were investigated. The structural and magnetic properties of SrM films on the Pt underlayers were compared with SrM films on thermally oxidized Si substrates. It was found that much better (001) texture was obtained on the films with Pt underlayers, as indicated by the strong (006), (008) and (0014) reflections from X-ray diffraction (XRD) measurement. A Pt interlayer was also found to further improve the (001) texture
Keywords
ferrites; magnetic thin films; magnetisation; sputter deposition; strontium compounds; texture; (001) texture; Pt; Pt interlayer; Pt underlayer; Si; SrFe2O4; X-ray diffraction; growth texture; interlayer; magnetic properties; sputtered strontium ferrite; strontium ferrite thin films; structural properties; textured growth; thermally oxidized Si substrates; Ferrite films; Magnetic films; Optical films; Reflection; Semiconductor films; Sputtering; Strontium; Substrates; X-ray diffraction; X-ray scattering;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.908635
Filename
908635
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