DocumentCode
1450440
Title
Transient measurements of SOI body contact effectiveness
Author
Sleight, Jeffrey W. ; Mistry, Kaizad R. ; Antoniadis, Dimitri A.
Author_Institution
Digital Equipment Corp., Hudson, MA, USA
Volume
19
Issue
12
fYear
1998
Firstpage
499
Lastpage
501
Abstract
A technique for characterizing the effectiveness of SOI MOSFET body contacts under transient conditions, by measuring the transient lateral bipolar current in a SOI pass gate, is demonstrated. Using this technique, the minimum rise or fall edge rate required to guarantee that the body potential over the device width follows the contact potential is defined. While this technique is applied specifically to a Schottky body tie, it can be generalized to other technologies and other body ties.
Keywords
MOSFET; contact potential; semiconductor device measurement; silicon-on-insulator; SOI MOSFET body contact; Schottky body tie; body potential; contact potential; lateral bipolar current; pass gate; transient measurement; Charge measurement; Contact resistance; Current measurement; Electrical resistance measurement; Immune system; Length measurement; MOSFET circuits; Silicon on insulator technology; Thickness measurement; Voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/55.735759
Filename
735759
Link To Document