• DocumentCode
    1450440
  • Title

    Transient measurements of SOI body contact effectiveness

  • Author

    Sleight, Jeffrey W. ; Mistry, Kaizad R. ; Antoniadis, Dimitri A.

  • Author_Institution
    Digital Equipment Corp., Hudson, MA, USA
  • Volume
    19
  • Issue
    12
  • fYear
    1998
  • Firstpage
    499
  • Lastpage
    501
  • Abstract
    A technique for characterizing the effectiveness of SOI MOSFET body contacts under transient conditions, by measuring the transient lateral bipolar current in a SOI pass gate, is demonstrated. Using this technique, the minimum rise or fall edge rate required to guarantee that the body potential over the device width follows the contact potential is defined. While this technique is applied specifically to a Schottky body tie, it can be generalized to other technologies and other body ties.
  • Keywords
    MOSFET; contact potential; semiconductor device measurement; silicon-on-insulator; SOI MOSFET body contact; Schottky body tie; body potential; contact potential; lateral bipolar current; pass gate; transient measurement; Charge measurement; Contact resistance; Current measurement; Electrical resistance measurement; Immune system; Length measurement; MOSFET circuits; Silicon on insulator technology; Thickness measurement; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/55.735759
  • Filename
    735759