• DocumentCode
    1454151
  • Title

    Electromagnetic bistable microactuator fabricated on a single wafer

  • Author

    Xiaodan Miao ; Xuhan Dai ; Peihong Wang ; Yi Huang ; Guifu Ding ; Xiaolin Zhao

  • Author_Institution
    Nat. Key Lab. of Nano, Shanghai Jiao Tong Univ., Shanghai, China
  • Volume
    7
  • Issue
    2
  • fYear
    2012
  • Firstpage
    99
  • Lastpage
    100
  • Abstract
    An electromagnetic bistable microactuator fabricated on a single wafer is presented. Its overall size is 3×3×1×mm. Tested results show that the bistable state of the device is realised by 5 V voltage pulse and held by the permanent magnet without current. The response time is 0.96×ms with a large displacement of 160××m.
  • Keywords
    electromagnetic actuators; microactuators; permanent magnets; electromagnetic bistable microactuator; permanent magnet; single wafer; size 1 mm; size 3 mm; voltage 5 V;
  • fLanguage
    English
  • Journal_Title
    Micro & Nano Letters, IET
  • Publisher
    iet
  • ISSN
    1750-0443
  • Type

    jour

  • DOI
    10.1049/mnl.2011.0572
  • Filename
    6156027
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1454151