DocumentCode
1454838
Title
The Center for Nanotechnology, Materials Science, and Microsystems
Author
Hsieh, K.C.
Author_Institution
He is the director of the Center for Nanotechnology, Materials Science, and Microsystems and a professor of electrical engineering at the National Tsing-Hua University, Hsin Chu, Taiwan, Republic of China.
Volume
5
Issue
1
fYear
2011
fDate
3/1/2011 12:00:00 AM
Firstpage
4
Lastpage
11
Abstract
The center for Nanotechnology, Materials Science, and Microsystems (CNMM) at the National Tsing Hua University (NTHU) was established in 2006, founded by the National Science Council (NSC). It consists of three parts, including core-facility clean rooms, the Nanomeasurement Laboratory, and a metallurgical factory. They work synergjstically to serve faculties, graduate students, and scientists within and outside the campus for their research needs.
Keywords
engineering facilities; laboratories; materials science; micromechanical devices; nanotechnology; research and development; CNMM; Center for Nanotechnology Materials Science and Microsystems; National Tsing Hua University; core-facility clean room; metallurgical factory; nanomeasurement laboratory; research needs; China; Laboratories; Nanoelectronics; Nanofabrication; Nanomaterials; Research and development;
fLanguage
English
Journal_Title
Nanotechnology Magazine, IEEE
Publisher
ieee
ISSN
1932-4510
Type
jour
DOI
10.1109/MNANO.2010.939834
Filename
5716830
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