• DocumentCode
    1456543
  • Title

    A novel interferometer for dimensional measurement of a silicon sphere

  • Author

    Nicolaus, R. Arnold ; Bönsch, Gerhard

  • Author_Institution
    Phys. Tech. Bundesanstalt, Braunschweig, Germany
  • Volume
    46
  • Issue
    2
  • fYear
    1997
  • fDate
    4/1/1997 12:00:00 AM
  • Firstpage
    563
  • Lastpage
    565
  • Abstract
    In order to accurately determine Avogadro´s constant, NA, the volume of a nearly perfect single-crystal silicon sphere of 1 kg mass and about 90 mm diameter is to be measured with a relative uncertainty less than 10-7. For this purpose,a new spherical Fizeau interferometer that allows the interference pattern to be evaluated by phase-stepping interferometry has been developed. This technique is based on a special algorithm for Fizeau interferences and requires four phase steps of one quarter of an interference order, which are achieved by changing the air pressure inside the environmental chamber. Uncertainties in the sub-nanometer range can be obtained by this interferometric method. The interferometer´s field of view covers an angle of about 600 imaged onto an electronic camera with about 16000 pixels, so that the variation of the diameter is measured with high angular resolution. For the measurements, the sphere rests on a three-point support. The sphere can be lifted and rotated around two perpendicular axes by means of a motor-driven manipulation device, so that it can be positioned in well-defined orientations
  • Keywords
    constants; density measurement; diameter measurement; elemental semiconductors; light interferometers; silicon; size measurement; 1 kg; 90 mm; Avogadro´s constant; Fizeau interferences; Fizeau interferometer; Si; air pressure; angular resolution; dimensional measurement; electronic camera; environmental chamber; interference pattern; interferometer; interferometric method; perpendicular axes; phase steps; phase-stepping interferometry; silicon sphere; sub-nanometer range; three-point support; Cameras; Interference; Lenses; Optical interferometry; Optical surface waves; Performance evaluation; Pixel; Silicon; Surface waves; Volume measurement;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/19.571915
  • Filename
    571915