Microdischarge-Based Sensors and Actuators for Portable Microsystems: Selected Examples

This paper describes the use of microdischarges as transducing elements in sensors and actuators. Chemical sensing of gases and liquids, pressure sensing in harsh environments, on-chip pressure regulation, and radiation detection methods are described. The devices targeted for these applications are presented from the perspective of the ease of integration into portable microsystems, with emphasis on compactness, power consumption, and the ability to operate over a wide range of temperatures and pressures. Performance results and other important integration considerations, such as manufacturing approaches and device packaging methods, are described for selected examples.