Temporally Resolved Imaging of Jet-Type Dielectric Barrier Discharge Using He and Ar/Acetone Crossed Gas Flows

Author

Urabe, Keiichiro ; Sands, Brian L. ; Sakai, Osamu ; Ganguly, Biswa N.

Author_Institution

Dept. of Electron. Sci. & Eng., Kyoto Univ., Kyoto, Japan

Volume

39

Issue

11

fYear

2011

Firstpage

2294

Lastpage

2295

Abstract

We report on temporally resolved images in a jet-type dielectric barrier discharge with two crossed gas flows obtained by a spectrally filtered intensified charge-coupled device (ICCD) camera. The crossed-flow configuration of He and Ar gases and a small acetone impurity added into the Ar flow simulated a discharge configuration and an organic precursor used for the practical application of material processing, respectively. From the ICCD images, streamer and transient glow discharges could be distinguished between the electrode and the substrate. Filtered emission from excited N₂⁺, CH, C₂, He, and Ar also revealed the excitation and decomposition processes in the discharge.

Keywords

CCD image sensors; argon; glow discharges; helium; organic compounds; plasma diagnostics; plasma jets; plasma materials processing; Ar; He; argon-acetone crossed gas flows; decomposition processes; dielectric barrier discharge; discharge configuration; excitation processes; excited Ar emissions; excited C2 emissions; excited CH emissions; excited He emissions; excited N₂⁺ emissions; filtered emission; helium-acetone crossed gas flows; intensified charge coupled device; jet type DBD; material processing; organic precursor; spectrally filtered ICCD camera; streamer discharges; temporally resolved imaging; transient glow discharges; Argon; Atmospheric measurements; Discharges; Electron tubes; Helium; Plasmas; Transient analysis; Atmospheric-pressure plasma jet (APPJ); dielectric barrier discharge (DBD); temporally resolved imaging;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2011.2111389

Filename

5723016