DocumentCode
1463851
Title
Guest editorial special section on microsensors and microsystems in harsh environments
Author
Fahrner, Wolfgang R. ; Werner, M.R.
Author_Institution
University of Freiburg
Volume
48
Issue
2
fYear
2001
fDate
4/1/2001 12:00:00 AM
Firstpage
247
Lastpage
248
Keywords
Chemical sensors; Cooling; Diode lasers; Electromechanical sensors; Micromechanical devices; Microsensors; Power lasers; Silicon carbide; Temperature dependence; Temperature sensors;
fLanguage
English
Journal_Title
Industrial Electronics, IEEE Transactions on
Publisher
ieee
ISSN
0278-0046
Type
jour
DOI
10.1109/TIE.2001.915401
Filename
915401
Link To Document