Micromachining of a piezocomposite transducer using a copper vapor laser

Author

Farlow, Roger ; Galbraith, Walter ; Knowles, Martin ; Hayward, Gordon

Author_Institution

Centre for Ultrasonic Eng., Strathclyde Univ., Glasgow, UK

Volume

48

Issue

3

fYear

2001

fDate

5/1/2001 12:00:00 AM

Firstpage

639

Lastpage

640

Abstract

A 1-3 piezocomposite transducer with front face dimensions of 2/spl times/2 mm has been micromachined using a copper vapor laser. The device consists of PZT5A piezoceramic pillars with a 65-/spl mu/m pitch suspended in a low viscosity thermosetting polymer. The kerf width is 13 /spl mu/m, and the transducer thickness is 170 /spl mu/m, making the device suitable for ultrasonic reception at frequencies close to 10 MHz.

Keywords

laser beam machining; lead compounds; micromachining; piezoceramics; ultrasonic transducers; 10 MHz; 13 micron; 170 micron; 2 mm; 65 micron; PZT; PZT5A piezoceramic pillars; PbZrO3TiO3; copper vapor laser; front face dimensions; kerf width; low viscosity thermosetting polymer; micromachining; piezocomposite transducer; transducer thickness; ultrasonic reception; Ceramics; Copper; Laser beam cutting; Micromachining; Optical device fabrication; Optical materials; Piezoelectric materials; Polymers; Scanning electron microscopy; Ultrasonic transducers;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.920684

Filename

920684