• DocumentCode
    1484018
  • Title

    Cener for advanced electronic materials processing

  • Author

    Masnari, Nino A. ; Hauser, John R. ; Lucovsky, Gerald ; Maher, Dennis M. ; Markunas, Robert J. ; Özturk, Mehmet C. ; Wortman, Jimmie J.

  • Author_Institution
    North Carolina State University
  • Volume
    81
  • Issue
    1
  • fYear
    1993
  • fDate
    1/1/1993 12:00:00 AM
  • Firstpage
    42
  • Lastpage
    59
  • Keywords
    Dielectric thin films; Integrated circuit manufacture; Integrated circuit technology; Materials processing; Materials science and technology; Microelectronics; Plasma applications; Plasma immersion ion implantation; Plasma materials processing; Plasma temperature;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/JPROC.1993.752025
  • Filename
    752025
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1484018