Abatement of perfluorocompounds (PFCs) in a microwave tubular reactor using O2 as an additive gas

This paper discusses the abatement of four perfluorocompounds (PFCs) in a microwave tubular reactor-C₂F₆, CF₄, SF₆, and CHF₃. The abatement was carried out using O₂ as an additive gas, and was studied as a function of O₂:PPC ratio, flow rate, power and pressure. Near 100% abatement was achieved for all the PFCs investigated. A detailed characterization of C₂F₆ abatement using GC, GC/MS, and inline Mass Spectrometer showed the major abatement products to be CO₂, COF₂, and F₂. The parameteric dependence of CF₄, SF₆, and CHF₃ abatement was also characterized experimentally, the major products from CF₄ abatement were similar to those from C₂F₆ abatement. Mass Spectroscopy indicated the main products for SF₆ abatement were SO₂F₂ , SO₂, and F₂ while those for CHF₃ were CO₂, COF₂, F₂, and HF. Additional experiments indicate that the microwave abatement unit can be successfully used to abate these PFC´s in the Integrated Circuit fabrication facilities