Electrothermal Atomic-Force Microscope Cantilever With Integrated Heater and n-p-n Back-to-Back Diodes

Author

Fletcher, Patrick C. ; Bhatia, Bikramjit S. ; Wu, Yan ; Shannon, Mark A. ; King, William P.

Author_Institution

Dept. of Mech. Sci. & Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA

Volume

20

Issue

3

fYear

2011

fDate

6/1/2011 12:00:00 AM

Firstpage

644

Lastpage

653

Abstract

This paper reports the integration of both electrical and thermal elements into the free end of an atomic-force microscope cantilever, where the electrode and heater-thermometer are electrically isolated by an NPN semiconductor back-to-back diode. The electrothermal cantilever can be self heated using an integrated solid-state heater to more than 600°C. The tip voltage can be measured or controlled independent of the tip temperature, either in the direct or the alternating current mode. To our knowledge, this setup is the first microcantilever to have a solid-state junction and heater integrated near a scanning probe tip.

Keywords

atomic force microscopy; cantilevers; diodes; electrodes; NPN semiconductor back-to-back diode; electrical element; electrode; electrothermal atomic force microscope cantilever; first microcantilever; heater-thermometer; integrated heater; integrated solid-state heater; scanning probe tip; solid-state junction; thermal element; tip temperature; Doping; Electrodes; Leg; Resistance heating; Silicon; Temperature measurement; Atomic-force microscope (AFM); cantilever; diode; electrothermal (ET); scanning probe microscopy;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2011.2127455

Filename

5749675